Figure 4. Photolithography and RIE process Flow for SU-8 deposition (from wafer treatment and preparation, PR coating, Thermal baking, UV Exposure, PEB, PR development to the final RIE process)

From

Etching Techniques for Thinning Silicon Wafer for Ultra Thin High Efficiency Interdigitated Back Contact Solar Cells

Iduabo John Afa, Gema López, Pablo Rafael Ortega Villasclaras

Journal of Optoelectronics Engineering. 2015, 3(1), 7-14 doi:10.12691/joe-3-1-2