Figure 18. (a) Bow Anisotropic Etch profile of RIE showing crystallographic orientations (b) The Effect of the synergy between the physical and chemical mechanisms during RIE

From

Etching Techniques for Thinning Silicon Wafer for Ultra Thin High Efficiency Interdigitated Back Contact Solar Cells

Iduabo John Afa, Gema López, Pablo Rafael Ortega Villasclaras

Journal of Optoelectronics Engineering. 2015, 3(1), 7-14 doi:10.12691/joe-3-1-2