Figure 24. Schematic illustration of the of GaN nanowire GAA transistor fabrication sequence of a GaN nanowire GAA transistor: (a) Structure of GaNOI wafer (b) Formation of GaN nanowire arrays (c) Reduced GaN nanowire arrays (d) Release of GaN nanowire (e) Regrowth of AlGaN/GaN heterostructure on the patterned GaNOI wafer (f) Schematic illustration of the nanodevice [100]

From

Review of GaN Nanostructured Based Devices

Ahmed M. Nahhas

American Journal of Nanomaterials. 2018, 6(1), 1-14 doi:10.12691/ajn-6-1-1