Figure 19. Schematic diagram of ZnO nanowire MEMS gas sensors from bottom to top, including SiO2 isolation layer, ITO micro heaters, ITO electrodes, SiO2 passivation layer and the hydrothermal synthesized ZnO nanowires [66]

From

Review of Recent Advances of ZnO Nanowires Based Sensors

Ahmed M. Nahhas

American Journal of Nanomaterials. 2020, 8(1), 18-31 doi:10.12691/ajn-8-1-3